Top Page > About JAMSTEC > Research Vessels, Facilities and Equipment > Facilities and Equipment in Yokosuka Headquarters > Electron Probe Microanalyzer
Outline
This device is suited for examination of surface configurations, including kind, content and condition of the distribution of chemical compositions in the samples by measuring the wavelength and intensity of characteristic x-rays and the quantity of secondary electrons, backscattered electrons generated by a slender condensed electron beam irradiates the surface of the specimen.
<Specification>
| Item | Explanation |
|---|---|
| Detectable element | B(5)∼U(92) |
| Wavelength Dispersive X-ray Spectrometer (WDS) | |
| X-ray spectrometry range | 0.087∼9.3nm |
| Number of X-ray spectrometers: | One to five selectable |
| Energy Dispersive X-ray Spectrometer (EDS) Energy resolution (FWHM) |
149eV |
| Accelerating voltage | 0.2∼40kV 0.2∼10kV (0.1kVsteps) 10∼40kV (0.5kVsteps) |
| Probe current range | 10-12∼10-5A |
| Probe current stability | ±1.5×10-3A/h |
| Secondary electron image resolution | 6nm (WD11mm,35kV) |
| Magnification | ×40∼300,000 (WD11mm) |
