Top Page > About JAMSTEC > Research Vessels, Facilities and Equipment > Facilities and Equipment in Yokosuka Headquarters > Scanning Electorn Microscope
Outline
Narrowly focused electron beams scan a selected surface area of the specimen. The modulating brightness of the CRT is detected and amplified by secondary electrons generated from the surface of the specimen. This device produces an image based on the quantity of secondary electrons generated from the surface of the specimen.
<Specifications>
| Item | Explanation |
|---|---|
| Resolution of secondary electron image | 1.0nm (15kV), 2.2nm (1kV) |
| Accelerating voltage | 0.5～30kV |
| Magnification | × 25～19,000 (LM mode) |
| × 100～650,000 (SEM mode) | |
| Probe current | 10-13A~2 × 10-9A |
| Electron gun | Field emission gun with cold cathode |
| Objective lens | Strongly excited conical lens |
| Specimen stage | Eucentric type |
| X-Y | 70mm×50mm |
| Rotation | 360° |
| WD (Z) | 1.5∼25mm |
| Tilt | -5∼+60° |
| Motor control | 5 axes |
| Computer | IBM PC/AT compatible |
| OS | Windows NT |
| Live image | 1,280×1,024 pixels |
| Stored image | 1,280×1,024 pixels, 2,056×2,048 pixels |
| Detectable element | B(5)∼U(92) |
| Energy resolution (FWHM) | 133eV |
