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Narrowly focused electron beams scan a selected surface area of the specimen. The modulating brightness of the CRT is detected and amplified by secondary electrons generated from the surface of the specimen. This device produces an image based on the quantity of secondary electrons generated from the surface of the specimen.
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| Resolution | @ |
| High vacuum mode | 3.5nm(30kV,WD:8mm,SEI) |
| Low vacuum mode | 5.5nm(30kV,WD:8mm,SEI) |
| Accelerating voltage | 0.3`30kV |
| Magnification | @ |
| High vacuum mode | ~18`300,000 |
| Low vacuum mode | ~18`300,000 |
| Specimen stage | Eucentric Type |
| @ | 5-axes motor driven (Computer control) |
| @ | X=125mm,Y=100mm,Z=43mm(WD:5`48mm) |
| @ | Inclination = 10`90Rotation = 360 |
| Element to be analyzed | B(5)`U(92) |
| Energy resolution | 144eV |
@
(1) Contact the Research Facilities Group of the Research Support Department at MARITEC, JAMSTEC.
(2) Requests for facilities use must be submitted at least one week before use. Please follow the directions in the "Request Form for Facilities use and Equipment."
(3) Please ask the person in charge for costs related to facilities use.
‘Head office in Yokosuka
@Natsushima-cho 2-15 Yokosuka City, Kanagawa Prefecture, 237-0061
@TEL: +81-468-67-9906 FAX: +81-468-67-9905
Copyright 1998 JAMSTEC. All Right Reserved.
